ellipsometry en · NOUN
Etymology
Etymology tree English ellipse Ancient Greek -ο- (-o-)der. Latin -o-bor. English -o- Proto-Indo-European *meh₁- Proto-Indo-European *-tḗr Proto-Indo-European *-trom Proto-Hellenic *-tron Ancient Greek -τρον (-tron) Ancient Greek μέτρον (métron) Proto-Indo-European *-h₂ Proto-Indo-European *-éh₂ Proto-Indo-European *-i-eh₂ Proto-Hellenic *-íā Ancient Greek -ῐ́ᾱ (-ĭ́ā) Ancient Greek -μετρία (-metría)der. Latin -metriader. Old French -métrieder. English -metry English ellipsometry From ellipse + -o- + -metry.
Meanings
- (uncountable) An optical technique for investigating the dielectric properties of thin films, especially those used in fabricating semiconductors